01194naa a2200229 a 450000100080000000500110000800800410001910000200006024500850008026000090016552005300017465000140070465300080071865300180072665300350074465300150077965300210079470000180081570000240083370000210085777300860087810295012006-02-21       1999    bl ---       0--  u    #d1 aASSIS, O. B. G.  aMorphology ealuation of sputtered Au films onto mica by atomic force microscopy.  c1999  aAtomic force microscope (AFM) was used to investigate the surface morphology of Au sputtered onto cleaved mica in ordinary deposition as used to SEM analysis. The data hae as basis the variation of the surface morphology by the film formation and the RMS roughness assessment. The results indicate a relative homogenity in the deposited film  with nuclei formation of dimensions around 40 nm height by 30nm diameters. The overall area, when measured by AFM way, is found to be approximately 5,5 times large due to deposition.  aroughness  aAFM  aAu deposition  aMicroscopia de Força Atômica  aSputtering  aSurface analysis1 aSANTOS, S. F.1 aBERNARDES-FILHO, R.1 aRODRIGUES, J. A.  tRevista Brasileira de Aplicações de Vácuo, Campinasgv.18, n.2, p.48-51, 1999.